Incoming-Outgoing Devices Coating Acceptance without Bakeout Pumping Speed Acceptance with Bakeout Leak Check Safety im Labor
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Message ID: 123     Entry time: Thu Mar 18 11:40:02 2021
Author: Cristina 
Category: test with bakeout 
Subject: SIS100/HEBT Manipulator C.Dorn 
Expected:  
Current Status:  
New Expected Date:  
Date Received: 17.03.21 
Status: DONE 
Visual Inspection: Not Needed 
Test Started: 18.03.21 
Setup: Setup 1 
Test Ended: 24.03.21 
Result: Accepted 
Outgoing Date: 29.03.21 
Taken by: M.Müller 
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