Incoming-Outgoing Devices Coating Acceptance without Bakeout Pumping Speed Acceptance with Bakeout Leak Check Safety im Labor
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Message ID: 166     Entry time: Tue Feb 15 09:56:13 2022
Author: Cristina 
Category: test without bakeout 
Subject: NTG chamber HEBT special installation 
Expected:  
Current Status:  
New Expected Date:  
Date Received: 03.02.22 
Status: DONE 
Visual Inspection: Not Needed 
Test Started: 10.02.22 
Setup: Customised 
Test Ended: 14.02.22 
Result: Cond. Accep. 
Outgoing Date: 25.06.22 
Taken by: S.Zeller 
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